The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 08, 2010
Filed:
May. 24, 2007
Chi-min Yu, Hsinchu, TW;
Chi-chih Chuang, Hsinchu, TW;
Yu-fang Chien, Taipei County, TW;
Hui-shen Shih, Chang-Hua Hsien, TW;
Chi-Min Yu, Hsinchu, TW;
Chi-Chih Chuang, Hsinchu, TW;
Yu-Fang Chien, Taipei County, TW;
Hui-Shen Shih, Chang-Hua Hsien, TW;
United Microelectronics Corp., Hsin-Chu, TW;
Abstract
A CMP head includes a membrane support and a membrane. The membrane support is disk-shaped, having an origin and a radius R. The membrane support has at least a ventilator disposed in a central region within the range between origin and (⅔) R, and at least a diversion opening disposed in a peripheral region within the range between (⅔) R and R. The membrane includes a disk-shaped part disposed on the first surface of the membrane support, and an annular part surrounding the annular sidewall of the membrane support.