The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 01, 2010
Filed:
Jun. 12, 2006
Jong-an Kim, Seoul, KR;
Dong-chun Lee, Gyeonggi-do, KR;
Chung-sam Jun, Gyeonggi-do, KR;
Ik-chul Kim, Gyeonggi-do, KR;
Sang-hee Kim, Gyeonggi-do, KR;
Jong-An Kim, Seoul, KR;
Dong-Chun Lee, Gyeonggi-do, KR;
Chung-Sam Jun, Gyeonggi-do, KR;
Ik-Chul Kim, Gyeonggi-do, KR;
Sang-Hee Kim, Gyeonggi-do, KR;
Samsung Electronics Co., Ltd., Suwon-si, Gyeonggi-do, KR;
Abstract
An optical inspection tool used to detect surface defects of a substrate include a chuck for holding a substrate and a lens unit disposed over the chuck. The lens unit includes at least a pair of oblique beam paths therein, wherein light penetrating the beam paths travels without angular deflection. The beam paths take the form of spaces formed through the lens unit, or flat portions formed on a lens within the lens unit. A camera is installed on the lens unit, and the camera converts light passing through the lens unit into an image. Methods of detecting surface defects of the substrate using the inspection tool are also provided.