The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 2010
Filed:
Mar. 05, 2008
Alex Novikov, Q. Motzkin, IL;
Royi Levav, Rishon le Zion, IL;
Yaron Zimmerman, Kiryat Tivon, IL;
Joel Seligson, Misgav, IL;
Vladimir Levinski, Nazareth-Ilit, IL;
Alex Novikov, Q. Motzkin, IL;
Royi Levav, Rishon le Zion, IL;
Yaron Zimmerman, Kiryat Tivon, IL;
Joel Seligson, Misgav, IL;
Vladimir Levinski, Nazareth-Ilit, IL;
KLA-Tencor Corporation, San Jose, CA (US);
Abstract
A method and system for performing measurements on a test sample with a metrology or inspection tool are disclosed. At least one of the test sample and the tool is moved with respect to the other from a first position to a second position. At the second position, the tool is aligned for measurement of a measurement target on the sample. A focus of the tool on the test sample is adjusted while moving from that first position to the second position.