The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 2010
Filed:
May. 13, 2003
Yuukoh Katoh, Tokyo, JP;
Yuukoh Katoh, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Abstract
Portions excluding magnetic elements of a laminate film of magnetic films or the like constituting magnetic elements () are oxidized/nitrided or oxynitrided to be insulated by a plasma processing using a conductive mask (), whereby a plurality of magnetic elements are separated. This laminate film comprises a magnetic element region () formed with magnetic elements () and an insulated region () consisting of oxides/nitrides or oxynitrides. Upper wiring such as a bit line () is formed later. Since the conductive mask used in forming the insulated region is made part of the upper wiring, the magnetic elements and the upper wiring can be disposed in contact with each other.