The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 2010
Filed:
Jul. 06, 2007
Applicant:
Toyonori Eto, Tokyo, JP;
Inventor:
Toyonori Eto, Tokyo, JP;
Assignee:
Elpida Memory, Inc., Tokyo, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/20 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for forming a semiconductor device includes a plurality of crown-type capacitors in a capacitor-receiving insulating film, wherein bottom electrodes of the capacitors have an insulating spacer between each two of the bottom electrodes. The insulating spacer is formed by removing a hard mask used as an etching mask for forming cylindrical holes receiving therein capacitors including the bottom electrodes.