The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 25, 2010
Filed:
May. 04, 2005
Sudhir Gondhalekar, Fremont, CA (US);
Robert Duncan, San Jose, CA (US);
Siamak Salimian, Sunnyvale, CA (US);
Muhammad M. Rasheed, Fremont, CA (US);
Harry Smith Whitesell, San Jose, CA (US);
Bruno Geoffrion, San Jose, CA (US);
Padmanabhan Krishnaraj, San Francisco, CA (US);
Rudolf Gujer, Saratoga, CA (US);
Diana E. Gujer, Legal Representative, Henderson, NV (US);
Sudhir Gondhalekar, Fremont, CA (US);
Robert Duncan, San Jose, CA (US);
Siamak Salimian, Sunnyvale, CA (US);
Muhammad M. Rasheed, Fremont, CA (US);
Harry Smith Whitesell, San Jose, CA (US);
Bruno Geoffrion, San Jose, CA (US);
Padmanabhan Krishnaraj, San Francisco, CA (US);
Rudolf Gujer, Saratoga, CA (US);
Diana E. Gujer, legal representative, Henderson, NV (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments of the present invention are directed to a gas distribution system which distributes the gas more uniformly into a process chamber. In one embodiment, a gas distribution system comprises a gas ring including an outer surface and an inner surface, and a gas inlet disposed at the outer surface of the gas ring. The gas inlet is fluidicly coupled with a first channel which is disposed between the outer surface and the inner surface of the gas ring. A plurality of gas outlets are distributed over the inner surface of the gas ring, and are fluidicly coupled with a second channel which is disposed between the outer surface and the inner surface of the gas ring. A plurality of orifices are fluidicly coupled between the first channel and the second channel. The plurality of orifices are spaced from the gas inlet by a plurality of distances, and have sizes which vary with the distances from the gas inlet as measured along the first channel, such that the size of the orifice increases with an increase in the distance between the orifice and the gas inlet as measured along the first channel.