The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2010
Filed:
Mar. 07, 2008
Kenichi Washio, Yokohama, JP;
Katsuo Yasuta, Hirosaki, JP;
Umenori Sugiyama, Hirakawa, JP;
Abstract
Reliability of results of a test such as a wafer burn-in test is raised. The present invention is a method for testing a plurality of semiconductor devices in a semiconductor wafer held in a cartridge. Each of the semiconductor devices has electrodes and the cartridge has a lower cartridge portion provided with a chuck holding the semiconductor wafer thereon, and an upper cartridge portion provided with a probe assembly having probes capable of contacting said electrodes. After constituting the cartridge and before placing the cartridge in the thermostatic chamber, a contact check to determine whether or not electrical contact between the electrodes of the semiconductor devices in the cartridge and the probes of the probe assembly is appropriate is performed.