The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2010
Filed:
Jun. 15, 2007
Yasuhiro Kawakatsu, Kanagawa, JP;
Hitoshi Abiko, Kanagawa, JP;
Hirofumi Nikaido, Kanagawa, JP;
Nobuyuki Katsuki, Kanagawa, JP;
Michihiro Kobayashi, Kanagawa, JP;
Yasuhiro Kawakatsu, Kanagawa, JP;
Hitoshi Abiko, Kanagawa, JP;
Hirofumi Nikaido, Kanagawa, JP;
Nobuyuki Katsuki, Kanagawa, JP;
Michihiro Kobayashi, Kanagawa, JP;
NEC Electronics Corporation, Kawasaki, Kanagawa, JP;
Abstract
A lower electrode projects outward from a common end face of an upper electrode and a capacitor film. A protective film, which is made of a different material from the capacitor film, is deposited on top of a part of the lower electrode outside the end face. The protective film also extends to the position at a certain distance inward from the end face, so that it is placed between the capacitor film and the lower electrode. The capacitor film thereby has a stepped surface near the end face due to the presence of the protective film, which suppresses the progress of damage during etching of the upper electrode and the capacitor film. Further, the protective film prevents the occurrence of damage in the lower electrode.