The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2010
Filed:
Oct. 26, 2006
Robert Bernath, Orlando, FL (US);
Christopher Brown, Orlando, FL (US);
Joshua Duncan, Orlando, FL (US);
Kazutoshi Takenoshita, Oviedo, FL (US);
Martin Richardson, Genova, FL (US);
Jose A. Cunado, Altamonte Springs, FL (US);
Robert Bernath, Orlando, FL (US);
Christopher Brown, Orlando, FL (US);
Joshua Duncan, Orlando, FL (US);
Kazutoshi Takenoshita, Oviedo, FL (US);
Martin Richardson, Genova, FL (US);
Jose A. Cunado, Altamonte Springs, FL (US);
University of Central Florida Research Foundation, Inc., Orlando, FL (US);
Abstract
Methods, systems, apparatus, devices for tracking, controlling and providing feedback on droplets used in EUV source technology. The method and system track and correct positions of droplet targets and generated plasma including generating the droplet target or plasma, optically imaging the generated target, determining position coordinates, comparing the position coordinates to a set optimal position to determine if a deviation has occurred and moving the generated target back to the optimal position if the deviation has occurred. The optical imaging step includes activating a light source to image the generated target, the light source is strobed at approximately the same rate as the droplet production to provide illumination of the droplet for stroboscopic imaging. The step of moving is accomplished mechanically by moving the generated target back to the predefined position or electronically under computer control.