The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2010
Filed:
Sep. 28, 2007
Sou Kamimura, Haibara-gun, JP;
Kenji Wada, Haibara-gun, JP;
Yasutomo Kawanishi, Ashigarakami-gun, JP;
Sou Kamimura, Haibara-gun, JP;
Kenji Wada, Haibara-gun, JP;
Yasutomo Kawanishi, Ashigarakami-gun, JP;
FUJIFILM Corporation, Tokyo, JP;
Abstract
A resist composition, includes: (B) a polymer having a group capable of decomposing under an action of an acid and having a weight average molecular weight of 1,000 to 5,000, of which solubility in an alkali developer increases under an action of an acid; and (Z) a compound containing a sulfonium cation having a structure represented by formula (Z-1): wherein Yto Yeach independently represents a hydrogen atom or a substituent, and adjacent members of Yto Ymay combine with each other to form a ring; and Z represents a single bond or a divalent linking group.