The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 18, 2010
Filed:
Apr. 08, 2004
Thomas Böhm, Köln, DE;
Ulrich Doebler, Wermelskirchen, DE;
Ralf Hirche, Köln, DE;
Werner Grosse Bley, Bonn, DE;
Thomas Böhm, Köln, DE;
Ulrich Doebler, Wermelskirchen, DE;
Ralf Hirche, Köln, DE;
Werner Grosse Bley, Bonn, DE;
Inficon GmbH, , DE;
Abstract
A leak detector operating according to the counterflow principle comprises a first high vacuum pump that operates in series with a primary pump. A second high vacuum pump is branched at a connecting point and an entry side thereof is connected to a mass spectrometer. A light test gas in the form of helium flows through the second high vacuum pump in a direction opposite to a transport direction. A conduit connecting an inlet to the entry side of the first high vacuum pump is devoid of restricted flow zones and valves in such a way that the pumping capacity of the leak detector is high for helium, thereby reducing the response time thereof. A valve for blocking the conduit leading via the first high vacuum pump is arranged between the exit side thereof and the entry side of the primary pump.