The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2010
Filed:
Aug. 01, 2008
Shingo Kiyotani, Tsukuba, JP;
Shingo Kiyotani, Tsukuba, JP;
Mitutoyo Corporation, Kawasaki-shi, JP;
Abstract
A surface texture measuring instrument includes: a movement-estimating unit for estimating a movement condition of a drive mechanism based on a scanning vector command issued by a scanning vector commander to calculate an estimated operation state quantity; and a correction-calculating unit for correcting a detection value of a drive sensor in accordance with the estimated operation state quantity calculated by the movement-estimating unit. The movement-estimating unit includes: a nominal-model setting unit in which a nominal model representing signal transfer function of the scanning vector command from the issuance of the scanning vector command to a reflection on a movement position of the scanning probe is stored. The correction-calculating unit includes a correction-amount calculating unit that calculates a correction amount for correcting a measurement error generated on account of deformation during the drive of the drive mechanism based on the estimated operation state quantity; and a measurement data synthesizing unit that synthesizes the detection value of the drive sensor and a detection sensor and the correction amount calculated by the correction-amount calculating unit to acquire a measurement data.