The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2010
Filed:
Sep. 11, 2007
Applicants:
Garrett John Long, San Jose, CA (US);
Saju Francis Olakengil, Sunnyvale, CA (US);
Pramod Gaud, San Jose, CA (US);
John Jacob Roberts, Berkeley, CA (US);
Inventors:
Garrett John Long, San Jose, CA (US);
Saju Francis Olakengil, Sunnyvale, CA (US);
Pramod Gaud, San Jose, CA (US);
John Jacob Roberts, Berkeley, CA (US);
Assignee:
KLA-Tencor Technologies Corporation, San Jose, CA (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
G06F 19/00 (2006.01); G06F 11/00 (2006.01); G01B 21/30 (2006.01); G01N 21/88 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method and system for semiconductor wafer inspection is disclosed. Each of a plurality of dies on a wafer may be probed with a probe tool to produce probe data. The probe data may be used to generate one or more non-repeating care areas. An inspection tool may use the non-repeating care areas to perform an inspection of the semiconductor wafer.