The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2010
Filed:
Mar. 26, 2007
Julian G. Blake, Gloucester, MA (US);
Dale K. Stone, Lynnfield, MA (US);
Lyudmila Stone, Lynnfield, MA (US);
David Suuronen, Newburyport, MA (US);
Julian G. Blake, Gloucester, MA (US);
Dale K. Stone, Lynnfield, MA (US);
Lyudmila Stone, Lynnfield, MA (US);
David Suuronen, Newburyport, MA (US);
Varian Semiconductor Equipment Associates, Inc., Glouster, MA (US);
Abstract
Electrostatic clamping devices and methods for reducing contamination to a workpiece coupled to an electrostatic clamping device are disclosed. According to an embodiment an electrostatic clamping device for coupling a workpiece comprises: an embossment portion on a surface of a body to contact the workpiece; and at least two electrodes within the body; wherein the two electrodes are separated by a separation portion below the embossment portion.