The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2010
Filed:
May. 24, 2007
Applicants:
Huibert Visser, Zevenhuizen, NL;
Pieter Willem Herman DE Jager, Rotterdam, NL;
Henri Johannes Petrus Vink, Den Haag, NL;
Marcus Gerhardus Hendrikus Meijerink, Den Haag, NL;
Inventors:
Huibert Visser, Zevenhuizen, NL;
Pieter Willem Herman De Jager, Rotterdam, NL;
Henri Johannes Petrus Vink, Den Haag, NL;
Marcus Gerhardus Hendrikus Meijerink, Den Haag, NL;
Assignee:
ASML Netherlands B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/54 (2006.01);
U.S. Cl.
CPC ...
Abstract
A radiation beam conditioning system comprising at least three optical paths in which the radiation is conditioned.