The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 11, 2010
Filed:
Jul. 17, 2007
Takahisa Yoshioka, Tokyo, JP;
Yoshiaki Sugishita, Tokyo, JP;
Takahisa Yoshioka, Tokyo, JP;
Yoshiaki Sugishita, Tokyo, JP;
Lintec Corporation, Tokyo, JP;
Abstract
A sheet S is stuck on the front surface of a wafer W, and the wafer W is supported on a table. A peeling tape T is stuck onto a peripheral portion of the sheet S and the peeling tape T is held by a peeling head. The peeling headand the tableperform a relative movement along guide rails, the tablerotates a predetermined angle in clockwise and counterclockwise directions alternately via a swing mechanismthereby peeling off the sheet S from the wafer W accompanying a zigzag movement.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile