The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 2010
Filed:
Aug. 23, 2007
Takeshi Kitatani, Hino, JP;
Kazunori Shinoda, Musashino, JP;
Takashi Shiota, Sagamihara, JP;
Shigeki Makino, Kokubunji, JP;
Toshihiko Fukamachi, Kokubunji, JP;
Takeshi Kitatani, Hino, JP;
Kazunori Shinoda, Musashino, JP;
Takashi Shiota, Sagamihara, JP;
Shigeki Makino, Kokubunji, JP;
Toshihiko Fukamachi, Kokubunji, JP;
Opnext Japan, Inc., Yokohama-shi, JP;
Abstract
In the optical integrated devices with ridge waveguide structure based on the conventional technology, there occur such troubles as generation of a recess in a BJ section to easily cause a crystal defect due to the mass transport phenomenon of InP when a butt joint (BJ) is grown, lowering of reliability of the devices, and lowering in a yield in fabrication of devices. In the present invention, a protection layer made of InGaAsP is provided on the BJ section. The layer has high etching selectivity for the InP cladding layer and remains on the BJ section even after mesa etching.