The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 04, 2010
Filed:
May. 16, 2007
Jeffrey W. Elam, Elmhurst, IL (US);
Alex B. F. Martinson, Evanston, IL (US);
Michael J. Pellin, Naperville, IL (US);
Joseph T. Hupp, Northfield, IL (US);
Jeffrey W. Elam, Elmhurst, IL (US);
Alex B. F. Martinson, Evanston, IL (US);
Michael J. Pellin, Naperville, IL (US);
Joseph T. Hupp, Northfield, IL (US);
UChicago Argonne, LLC, Chicago, IL (US);
Abstract
A method and system for preparing a light transmitting and electrically conductive oxide film. The method and system includes providing an atomic layer deposition system, providing a first precursor selected from the group of cyclopentadienyl indium, tetrakis (dimethylamino) tin and mixtures thereof, inputting to the deposition system the first precursor for reaction for a first selected time, providing a purge gas for a selected time, providing a second precursor comprised of an oxidizer, and optionally inputting a second precursor into the deposition system for reaction and alternating for a predetermined number of cycles each of the first precursor, the purge gas and the second precursor to produce the oxide film.