The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2010
Filed:
Jul. 24, 2007
Applicant:
Alexander Veis, Kadima, IL;
Inventor:
Alexander Veis, Kadima, IL;
Assignee:
Applied Materials Israel, Ltd., Rehovot, IL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A method for immersion based inspection, the method includes: (i) receiving an article that comprises a wafer and a transparent element, wherein a first fluid substantially fills a space between an upper surface of the wafer and the transparent element; and (ii) inspecting the wafer by utilizing a lens that contacts a second fluid element that also contacts the transparent element.