The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2010
Filed:
Jun. 29, 2007
Methods and systems for providing illumination of a specimen for a process performed on the specimen
Greg Kirk, Pleasanton, CA (US);
Rich Solarz, Danville, CA (US);
Chris Kirk, Beaconsfield, GB;
Gil Delgado, Livermore, CA (US);
Anatoly Schemelinin, Pleasanton, CA (US);
Jim LI, San Jose, CA (US);
Qibiao Chen, Fremont, CA (US);
Charles Nenghe Wang, Santa Clara, CA (US);
Greg Kirk, Pleasanton, CA (US);
Rich Solarz, Danville, CA (US);
Chris Kirk, Beaconsfield, GB;
Gil Delgado, Livermore, CA (US);
Anatoly Schemelinin, Pleasanton, CA (US);
Jim Li, San Jose, CA (US);
Qibiao Chen, Fremont, CA (US);
Charles Nenghe Wang, Santa Clara, CA (US);
KLA-Tencor Technologies Corp., Milpitas, CA (US);
Abstract
Methods and systems for providing illumination of a specimen for a process performed on the specimen are provided. One system configured to provide illumination of a specimen for a process performed on the specimen includes a laser configured to generate excitation light. The system also includes focusing optics configured to focus the excitation light to a plasma in an electrodeless lamp such that the plasma generates light. The system is also configured such that the light illuminates the specimen during the process.