The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 27, 2010
Filed:
Apr. 13, 2005
Hidetoshi Morokuma, Hitachinaka, JP;
Noriaki Arai, Hitachinaka, JP;
Takashi Doi, Hitachinaka, JP;
Fumihiro Sasajima, Hitachinaka, JP;
Yoshihiro Kimura, Hitachinaka, JP;
Hidetoshi Morokuma, Hitachinaka, JP;
Noriaki Arai, Hitachinaka, JP;
Takashi Doi, Hitachinaka, JP;
Fumihiro Sasajima, Hitachinaka, JP;
Yoshihiro Kimura, Hitachinaka, JP;
Hitachi High-Technologies Corporation, Tokyo, JP;
Abstract
In an apparatus for obtaining an image by irradiating a charged particle beam on a specimen, a condition of the beam conditioned differently from vertical incidence as in the case of the beam being tilted is required to be adjusted. To this end, the apparatus has a controller for automatically controlling a stigmator, an objective lens and a deflector such that astigmatism is corrected, focus is adjusted and view filed shift is corrected. The controller has a selector for inhibiting at least one of the astigmatism correction, focus adjustment and FOV shift correction from being executed.