The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 06, 2010

Filed:

Jul. 31, 2007
Applicant:

Toshiyuki Kaeriyama, Ibaraki, JP;

Inventor:

Toshiyuki Kaeriyama, Ibaraki, JP;

Assignee:
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02F 1/02 (2006.01); G02B 26/00 (2006.01); G02B 27/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

A system and method for regulating micromirror position in a digital micromirror device. The system and method adjusts micromirror operating temperature and/or a reset sequence of the micromirror by determining a desired tilt angle, adjusting voltage potentials of signals in a reference reset sequence, and saving the adjusted reset sequence. The adjustments are used to alter a voltage potential difference between micromirrors of the digital micromirror device and respective address lines, thereby allowing for a precise regulation of a tilt angle of the micromirrors. Additionally, the operating temperature of the digital micromirror device may also be controlled to regulate micromirror position. The precise control of the tilt angle of the micromirrors permits the use of digital micromirror devices in systems requiring fine focus and increased focus depth, such as photolithography and holography.


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