The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2010
Filed:
May. 19, 2005
Kazumichi Machida, Takarazuka, JP;
Atsuo Urata, Ibaraki, JP;
Takeshi Konno, Tsukuba, JP;
Akira Ishida, Tsukuba, JP;
Mitsuru Egashira, Tsukuba, JP;
Mikihiko Kobayashi, Ishioka, JP;
Kazumichi Machida, Takarazuka, JP;
Atsuo Urata, Ibaraki, JP;
Takeshi Konno, Tsukuba, JP;
Akira Ishida, Tsukuba, JP;
Mitsuru Egashira, Tsukuba, JP;
Mikihiko Kobayashi, Ishioka, JP;
National Institute for Materials Science, Tsukuba, JP;
Japan Electronic Materials Corporation, Amagasaki, JP;
Abstract
It is an object of the present invention to provide a probe which can provide stable electrical conduction to an electrode of an object to be measured even when it is miniaturized. A probecomprises a columnar contact partwhich can come in contact with an electrodeof an object to be measured almost perpendicularly, and a base end (not shown) connected to the contact part, the contact partcomprises a base partand an expansion partbonded to an end of the base partin a width direction, and the expansion partis formed of a material having a thermal expansion coefficient higher than that of the base part