The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2010
Filed:
Oct. 20, 2005
Applicants:
Tomohisa Hoshino, Amagasaki, JP;
Yoshiki Yamanishi, Sanda, JP;
Hiroyuki Hashimoto, Nishinomiya, JP;
Inventors:
Assignee:
Tokyo Electron Limited, , JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 31/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
A probe needleincludes a cantilevera columnand a tipThe columnis cantilevered from an end of the cantileverThe tipis formed on a top end of the columnThe columnis formed so as to be longer than the tipThe heights of the columnand tipare chosen so that their sum is twice or more than twice the width of the columnar