The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2010
Filed:
Sep. 28, 2007
Martin Franosch, Munich, DE;
Andreas Meckes, Munich, DE;
Winfried Nessler, Munich, DE;
Klaus-gunter Oppermann, Holzkirchen, DE;
Martin Franosch, Munich, DE;
Andreas Meckes, Munich, DE;
Winfried Nessler, Munich, DE;
Klaus-Gunter Oppermann, Holzkirchen, DE;
Infineon Technologies AG, Neubiberg, DE;
Abstract
Apparatus for housing a micromechanical structure, and a method for producing the housing. The apparatus has a substrate having a main side on which the micromechanical structure is formed, a photo-resist material structure surrounding the micromechanical structure to form a cavity together with the substrate between the substrate and the photo-resist material structure, wherein the cavity separates the micromechanical structure and the photo-resist material structure and has an opening, and a closure for closing the opening to close the cavity.