The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 06, 2010
Filed:
May. 01, 2006
Werner H. Hort, Cranberry, PA (US);
Scott R. Sayles, Mead, WA (US);
Vince Speziale, Mead, WA (US);
Stephane Ferrasse, Veradale, WA (US);
Harold A. Detlaff, Chattaroy, WA (US);
Stuart D. Wright, Hayden Lake, ID (US);
Frank Alford, Spokane Valley, WA (US);
Andrew N. A. Wragg, Timperley, GB;
Werner H. Hort, Cranberry, PA (US);
Scott R. Sayles, Mead, WA (US);
Vince Speziale, Mead, WA (US);
Stephane Ferrasse, Veradale, WA (US);
Harold A. Detlaff, Chattaroy, WA (US);
Stuart D. Wright, Hayden Lake, ID (US);
Frank Alford, Spokane Valley, WA (US);
Andrew N. A. Wragg, Timperley, GB;
Honeywell International Inc., Morristown, NJ (US);
Abstract
The invention includes backing plates having coolant deflectors with at least a portion of each of the deflectors being nonlinear. Projections projecting from the backing plate are configured to insert into openings within a sputtering target. The invention includes targets having at least one opening to receive a fastener extending into the target through a back surface. The invention includes a target assembly having projections projecting from the backing plate and insertable within openings within the target. The invention includes a target assembly having a plurality of coolant deflectors disposed between the target and the backing plate. A segment of each of the deflectors is nonlinear. The invention includes methods of cooling a target. Coolant deflectors are disposed within a gap between the target and a backing plate with coolant deflectors being nonlinear along at least a portion of their length.