The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2010
Filed:
Oct. 24, 2005
Applicants:
Francois Rieutord, Saint Egreve, FR;
Hubert Moriceau, Saint Egreve, FR;
Benoit Bataillou, Ghent, BE;
Inventors:
Francois Rieutord, Saint Egreve, FR;
Hubert Moriceau, Saint Egreve, FR;
Benoit Bataillou, Ghent, BE;
Assignee:
Commissariat a l'Energie Atomique, Paris, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 23/20 (2006.01);
U.S. Cl.
CPC ...
Abstract
The adhesion between two layers, in particular two thin layers of a microelectronic device, is a data item of importance. It was found that the closure ratio of the interface could be used, in non-destructive manner, to determine a measurement of bond energy. A method and a device using a magnitude characteristic of this length are described, in particular using low incidence X-ray reflection and electronic density at the interface.