The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 30, 2010
Filed:
Jan. 27, 2005
Yoshio Sakurai, Tokyo, JP;
Yutaka Ogawa, Tokyo, JP;
Yoshio Sakurai, Tokyo, JP;
Yutaka Ogawa, Tokyo, JP;
NAS Giken Inc., Tokyo, JP;
Abstract
A substrate inspection device includes a substrate rotating device for holding a substrate on a holding surface and causing rotation, a disk having a disk body rotatably supported on a base and three lift cams fixed to an upper side of the disk body and formed with cam faces that are inclined surfaces inclined in the rotational direction, and a lifter having a lifter body with a support surface on which the substrate is mounted and guiding in the vertical direction and lifter driven sections respectively projecting to and fixed to a lower side of the lifter body, where lower sides of the lifter driven sections respectively contact the cam faces in a sliding manner at contact points, and if the contact points are moved to an upper side of the inclined surfaces the support surface becomes higher than the holding surface.