The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 2010
Filed:
Mar. 06, 2007
Chih-ming Lai, Hsin-Chu, TW;
Ru-gun Liu, Hsin-Chu, TW;
I-chang Shin, Hsin-Chu, TW;
Yao-ching Ku, Hsin-Chu, TW;
Cliff Hou, Taipei, TW;
Chih-Ming Lai, Hsin-Chu, TW;
Ru-Gun Liu, Hsin-Chu, TW;
I-Chang Shin, Hsin-Chu, TW;
Yao-Ching Ku, Hsin-Chu, TW;
Cliff Hou, Taipei, TW;
Taiwan Semiconductor Manufacturing Company, Ltd., Hsin-Chu, TW;
Abstract
A method for detection and scoring of hotspots in a design layout is provided. A plurality of indices is derived for a plurality of positions in the design layout. The plurality of indices comprises a first index sensitive to energy exposure of the design layout, a second index sensitive to process image formation, and a third index sensitive to mask manufacturing error. The plurality of indices is then analyzed to identify at least one hotspot in the design layout. The at least one hotspot is then prioritized using an integrated hotspot scoring system. The integrated hotspot scoring system prioritizes hotspots based on a look-up table approach or an interpolation approach.