The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 2010
Filed:
Sep. 26, 2007
Applicant:
Karl-eugen Aubele, Geislingen/Steige, DE;
Inventor:
Karl-Eugen Aubele, Geislingen/Steige, DE;
Assignee:
Carl Zeiss SMT AG, Oberkochen, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 7/02 (2006.01); G02B 26/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
The disclosure generally relates to methods, devices, systems and components configured to position an element in a lens assembly, such as a lens assembly for microlithography, in which the element to be positioned is moved from an actual position to a target position via at least one actuator, and in which at least the positioning movement of the actuator is superimposed with an oscillating movement.