The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 2010
Filed:
Nov. 14, 2006
Doron Meshulach, Ramat-Gan, IL;
Haim Feldman, Nof-ayalon, IL;
Doron Meshulach, Ramat-Gan, IL;
Haim Feldman, Nof-ayalon, IL;
Applied Materials Israel, Ltd., Rehovot, IL;
Abstract
Apparatus for imaging a surface, including scanning optics, which are configured to scan and focus one or more traveling beams onto the surface so as to form one or more traveling spots thereon. The apparatus also includes collection optics, which are arranged to collect radiation scattered from the one or more traveling spots and to focus the radiation to form one or more image spots traveling along a line. The apparatus also has a detecting assembly, which consists of a detector which is configured to generate a signal in response to the one or more traveling image spots, and a detector entry port interposed between the collection optics and the detector, which is coincident with the line. The apparatus also includes phase and/or polarization altering elements for the traveling beams.