The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 2010
Filed:
Apr. 27, 2007
Takumi Sannomiya, Kochi-Ken, JP;
Yukihito Kondo, Tokyo, JP;
Takumi Sannomiya, Kochi-Ken, JP;
Yukihito Kondo, Tokyo, JP;
Jeol Ltd., Tokyo, JP;
Abstract
In a transmission electron microscope, an electron beam flux of a cross section constricted conically over a reference specimen is made to hit the reference specimen. The flux includes electron beams hitting the specimen at incident angles which spread conically in the direction of irradiation. The beams are focused onto a fluorescent screen at positions which are different in distance from the center according to the incident angles. A transmission image of the beam flux is gained. A Fourier transform is performed for each of inspection regions set on the transmission image. Aberration coefficients C, C, . . . , Care calculated from the obtained, Fourier-transformed images by image processing. Aberration in the imaging lenses is corrected. Consequently, the aberration can be corrected by finding the aberration coefficients C, C, . . . , Cfrom only one transmission image. The number of transmission images or the acquisition time is reduced.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile