The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 2010
Filed:
Apr. 10, 2006
Osamu Kobayashi, Ibaraki-ken, JP;
Toshihiko Ishida, Ibaraki-ken, JP;
Osamu Kobayashi, Ibaraki-ken, JP;
Toshihiko Ishida, Ibaraki-ken, JP;
Choshu Industry Co., Ltd., Sanyoonoda-shi, Yamaguchi, JP;
Abstract
A molecular beam source for use in thin-film accumulation, which enables the adjustment of the volume of a molecular beam, which is discharged per hour by using a needle valve, to be constant irrespective of a decrease in a thin-film element-forming material remaining within a crucible, contains heatersandfor heating the thin-film element-forming materials 'a' and 'b' within cruciblesand, and valvesandfor adjusting the volumes to be discharged of molecules of the thin-film element forming materials “a” and “b”, which are generated within the cruciblesand. It further contains a controller for adjusting the opening of the valvesandby servomotorsandthrough feeding back information relating to the volumes of the molecular beams, which are obtained from film-thickness metersandfor detecting the volume of molecular beams discharged towards the film-forming surface, a heating electric power source for supplying an electric power to heatersand, and a controller for adjusting the electric power to be supplied to the heating electric power source depending upon the information relating to the volume of the molecular sources and information relating to the opening of the valves.