The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 2010
Filed:
Aug. 09, 2004
Applicant:
Ofer Sneh, Boulder, CO (US);
Inventor:
Ofer Sneh, Boulder, CO (US);
Assignee:
Sundew Technologies, LLC, Broomfield, CO (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/00 (2006.01); C23F 1/00 (2006.01); H01L 21/306 (2006.01); C23C 16/06 (2006.01); C23C 16/22 (2006.01);
U.S. Cl.
CPC ...
Abstract
A seal-protected perimeter partition valve apparatus () defines a vacuum and pressure sealed space () within a larger space () confining a substrate processing chamber with optimized geometry, minimized footprint and 360° substrate accessibility. A compact perimeter partitioned assembly () with seal protected perimeter partition valve () and internally contained substrate placement member () further provides processing system modularity and substantially minimized system footprint.
Published as:
WO2005015613A2; WO2005015613A3; EP1661161A2; US2007051312A1; US7682454B2; US2010166957A1; US8252116B2;