The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 23, 2010
Filed:
Nov. 07, 2003
Takahiro Nishibayashi, Kumamoto, JP;
Takahiro Nishibayashi, Kumamoto, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
An SOD system (A) comprises a process block () for performing a prescribed processing so as to form an insulating film on a wafer W, a carrier block () for transferring the wafer W from the outside into the process block (), a sub-transfer mechanism () for transferring the substrate W between the process block () and the carrier block (), and a main transfer mechanism (). A process tower (T) prepared by stacking one upon the other a plurality of process units for performing a series of processing for forming an insulating film on the wafer W is arranged detachable from the process block ().
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile