The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2010
Filed:
Oct. 04, 2005
Akira Endo, Tokyo, JP;
Tatsuya Ariga, Hiratsuka, JP;
Takashi Suganuma, Hiratsuka, JP;
Taisuke Miura, Hiratsuka, JP;
Akira Endo, Tokyo, JP;
Tatsuya Ariga, Hiratsuka, JP;
Takashi Suganuma, Hiratsuka, JP;
Taisuke Miura, Hiratsuka, JP;
Komatsu Ltd., Tokyo, JP;
Gigaphoton Inc., Tokyo, JP;
Abstract
A driver laser for EUV light source apparatus which driver laser simultaneously achieves short-pulsing and multi-line oscillation. The driver laser includes: a short-pulse multi-line oscillated COlaser oscillator having a device that shortens width of pulses included in a laser beam to be output and a device that suppresses amplitude of an oscillation spectrum exhibiting an energy peak value; and at least one amplifier that inputs the laser beam output from the short-pulse multi-line oscillated COlaser oscillator and amplifies the input laser beam to output the amplified laser beam.