The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2010
Filed:
Jun. 07, 2007
Applicant:
Hitoshi Nakano, Tochigi, JP;
Inventor:
Hitoshi Nakano, Tochigi, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03B 27/42 (2006.01); G03B 27/52 (2006.01);
U.S. Cl.
CPC ...
Abstract
An exposure apparatus including a projection optical system which projects a pattern of an original onto an exposed surface of a substrate, and a supply nozzle configured to supply the liquid through a supply opening into a gap between a final surface of the projection optical system and a part of the exposed surface of the substrate. The supply opening is arranged more distant than the final surface of the projection optical system from the exposed surface of the substrate.