The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2010
Filed:
Aug. 31, 2006
Jurgen Amon, Dresden, DE;
Jurgen Faul, Radebeul, DE;
Thomas Ruder, Dresden, DE;
Thomas Schuster, Dresden, DE;
Jurgen Amon, Dresden, DE;
Jurgen Faul, Radebeul, DE;
Thomas Ruder, Dresden, DE;
Thomas Schuster, Dresden, DE;
Qimonda, AG, Munich, DE;
Abstract
A semiconductor structure having a plurality of gate stacks on a semiconductor substrate provided with a gate dielectric. The gate stacks have a lower first layer made of polysilicon, an overlying second layer made of a metal silicide, and an upper third layer made of an insulating material, and a sidewall oxide on the sidewalls of the first and second layers. The sidewall oxide is thinned or removed on one of the sidewalls, and the gate stacks have sidewall spacers made of the insulating material.