The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2010
Filed:
Jan. 19, 2007
Yoshinori Ikebuchi, Tokyo, JP;
Yoshinori Ikebuchi, Tokyo, JP;
Elpida Memory, Inc., Tokyo, JP;
Abstract
The present invention has an object to provide a method for manufacturing a dynamic random access memory capable of reducing a defect rate even if the memory has a large packing density. The method of the present invention is a method for manufacturing a dynamic random access memory having memory array areas and a peripheral circuit area arranged in a semiconductor substrate and a silicon nitride film provided over the memory array areas and the peripheral circuit area, the method having at least a step (1) of eliminating the silicon nitride film provided in the peripheral circuit area; and a step (2) of processing in an atmosphere of a hydrogen gas a substrate-to-be-processed obtained by the step (1).