The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7678666 B1

PDF
Full Text
Expired
Date of Patent:
Mar. 16, 2010

Filed:

May. 09, 2006
Applicants:

Ki Bong Song, Daejeon, KR;

Jun Ho Kim, Incheon, KR;

Inventors:

Ki Bong Song, Daejeon, KR;

Jun Ho Kim, Incheon, KR;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/76 (2006.01);
U.S. Cl.
CPC ...
Abstract

A layer structure comprising substrate, a metal layer, a first amorphous silicon layer, an insulating layer, and a second amorphous silicon layer, and a method of crystallizing the second amorphous silicon layer by irradiating single pulse laser to the layer structure are provided. The method provides an effect of forming large grain of amorphous silicon as good as using dual pulse laser or higher just by using single pulse laser without additional optical system. A semiconductor device employing the layer structure maximizes an electron mobility.


Find Patent Forward Citations

Song, Ki. (2010). Crystallization method of amorphous silicon for forming large grain with single pulse laser (U.S. Patent No. 7678666). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7678666

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