The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 16, 2010
Filed:
Aug. 09, 2006
Applicants:
Wuu-jyh Lin, Taoyuan County, TW;
Mao-hsung Chang, Hsinchu County, TW;
Ping-yen Huang, Miaoli County, TW;
Jenn-tzong Chen, Taipei, TW;
Ting-shien Duh, Taoyuan County, TW;
Dow-che Chen, Taoyuan County, TW;
Kuo-yuan Chu, Taoyuan County, TW;
Inventors:
Wuu-Jyh Lin, Taoyuan County, TW;
Mao-Hsung Chang, Hsinchu County, TW;
Ping-Yen Huang, Miaoli County, TW;
Jenn-Tzong Chen, Taipei, TW;
Ting-Shien Duh, Taoyuan County, TW;
Dow-Che Chen, Taoyuan County, TW;
Kuo-Yuan Chu, Taoyuan County, TW;
Assignee:
Atomic Energy Council, Taoyuan, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C23C 14/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A liquid and a gas is constantly filled into a target chamber of a target. Then the liquid and the gas flow around the chamber and are flown out. By doing so, the target is effectively cooled down.