The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 2010
Filed:
Sep. 08, 2006
Katsuhisa Fujii, Koshi, JP;
Masato Nomura, Koshi, JP;
Shuji Ohno, Koshi, JP;
Toshifumi Sohara, Koshi, JP;
Katsuhisa Fujii, Koshi, JP;
Masato Nomura, Koshi, JP;
Shuji Ohno, Koshi, JP;
Toshifumi Sohara, Koshi, JP;
Tokyo Electron Limited, Tokyo-To, JP;
Abstract
Disclosed is a method of verifying a recipe execution program. When a computer executes a recipe execution program, the computer sends instructions, which are issued based on a process recipe data defining specific operations to be performed by a substrate processing apparatus, to the substrate processing apparatus. When a computer executes a log output program, the computer outputs a log data indicating the instructions sent to the substrate processing apparatus. When a computer executes a comparing and checking program, the computer compares the log data which the process recipe data corresponding to the log data.