The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 09, 2010
Filed:
May. 05, 2006
Enno Van Den Brink, Eindhoven, NL;
Henricus Wilhelmus Maria Van Buel, Eindhoven, NL;
Joseph Consolini, Costa Mesa, CA (US);
Gerardus Johannes Joseph Keijsers, Venlo, NL;
Klaus Simon, Eindhoven, NL;
Johannes Theodoor DE Smit, Eindhoven, NL;
Richard Joseph Travers, Atkinson, NH (US);
Maurice Anton Jaques Teuwen, Weert, NL;
Arnout Johannes Meester, Eindhoven, NL;
Frederick William Hafner, Effort, PA (US);
Vinyu Greenlee, Gilbert, AZ (US);
Hubertus Antonius Marinus Baijens, Mierlo, NL;
Enno Van Den Brink, Eindhoven, NL;
Henricus Wilhelmus Maria Van Buel, Eindhoven, NL;
Joseph Consolini, Costa Mesa, CA (US);
Gerardus Johannes Joseph Keijsers, Venlo, NL;
Klaus Simon, Eindhoven, NL;
Johannes Theodoor De Smit, Eindhoven, NL;
Richard Joseph Travers, Atkinson, NH (US);
Maurice Anton Jaques Teuwen, Weert, NL;
Arnout Johannes Meester, Eindhoven, NL;
Frederick William Hafner, Effort, PA (US);
Vinyu Greenlee, Gilbert, AZ (US);
Hubertus Antonius Marinus Baijens, Mierlo, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
According to one of the aspects of the present invention there is provided a substrate carrier arranged to hold a substrate in position using a vacuum, the vacuum being established in a sealed space created between the substrate carrier and the substrate.