The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 2010
Filed:
May. 09, 2008
Applicant:
Masayuki Inokuchi, Tokyo, JP;
Inventor:
Masayuki Inokuchi, Tokyo, JP;
Assignee:
JEOL Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/21 (2006.01);
U.S. Cl.
CPC ...
Abstract
An autofocus method for bringing an electron beam into focus on a specimen. Characteristics of the brightness at plural kinds of focus values are found for sets of data. The characteristics are accumulated creating a focus function. The focus function is approximated by a quadratic curve. The focus value at the peak point is found from the quadratic curve. Based on the focus value, the focal condition of the beam is set.