The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 2010
Filed:
Feb. 20, 2008
Oh-jung Kwon, Hopewell Junction, NY (US);
Kenneth T. Settlemyer, Jr., Poughquag, NY (US);
Ravikumar Ramachandran, Pleasantville, NY (US);
Min-soo Kim, Sandston, VA (US);
Oh-Jung Kwon, Hopewell Junction, NY (US);
Kenneth T. Settlemyer, Jr., Poughquag, NY (US);
Ravikumar Ramachandran, Pleasantville, NY (US);
Min-Soo Kim, Sandston, VA (US);
International Business Machines Corporation, Armonk, NY (US);
Infineon Technologies North America Corp., San Jose, CA (US);
Infineon Technologies AG, Munich, DE;
Abstract
A method of fabricating a bottle trench and a bottle trench capacitor. The method including: providing a substrate; forming a trench in the substrate, the trench having sidewalls and a bottom, the trench having an upper region adjacent to a top surface of the substrate and a lower region adjacent to the bottom of the trench; forming an oxidized layer of the substrate in the bottom region of the trench; and removing the oxidized layer of the substrate from the bottom region of the trench, a cross-sectional area of the lower region of the trench greater than a cross-sectional area of the upper region of the trench.