The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 2010
Filed:
Apr. 24, 2006
Toni D. Van Gompel, Austin, TX (US);
Peter J. Beckage, Austin, TX (US);
Mohamad M. Jahanbani, Austin, TX (US);
Michael D. Turner, San Antonio, TX (US);
Toni D. Van Gompel, Austin, TX (US);
Peter J. Beckage, Austin, TX (US);
Mohamad M. Jahanbani, Austin, TX (US);
Michael D. Turner, San Antonio, TX (US);
Freescale Semiconductor, Inc, Austin, TX (US);
Abstract
A process of forming an electronic device can include patterning a semiconductor layer to define an opening. After patterning the semiconductor layer, the opening can have a bottom, and the semiconductor layer can have a sidewall and a surface. The surface is spaced apart from the bottom of the opening. The sidewall can extend from the surface towards the bottom of the opening. The process can also include forming a layer over the semiconductor layer and within the opening, and removing a part of the first layer from within the opening. After removing the part of the layer, a remaining portion of the layer may lie within the opening and adjacent to the bottom and the sidewall, and the remaining portion of the layer may be spaced apart from the surface. In another aspect, the electronic device can include a field isolation region including the first layer.