The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 02, 2010
Filed:
Feb. 14, 2006
Nobuhiro Hayashi, Chigasaki, JP;
Shin Yokoi, Chigasaki, JP;
Isao Tada, Chigasaki, JP;
Atsushi Nakatsuka, Chigasaki, JP;
Nobuhiro Hayashi, Chigasaki, JP;
Shin Yokoi, Chigasaki, JP;
Isao Tada, Chigasaki, JP;
Atsushi Nakatsuka, Chigasaki, JP;
Ulvac, Inc., Kanagawa, JP;
Abstract
The problem solved by this Invention is to provide a vacuum evaporation deposition method of the winding type and a vacuum evaporation deposition apparatus of the winding type which can form a metal film on a base film made of single layer plastic film without thermal deformation and with superior productivity. To solve the above problem, there are provided an electron beam irradiatorfor irradiating an electron beam onto a film materialarranged between an unwinding rollerand a deposition source; an auxiliary rollerfor guiding the filmin contact with the deposited metal layer and arranged between a can rollerand a winding roller; a DC bias power sourcefor applying a DC voltage between the auxiliary rollerand the can roller; electricity removing unitfor removing electricity from the filmand arranged between the can rollerand the winding roller. The electricity removing unitis a plasma generating source of the DC dipolar discharge type wherein one of its electrodes is earthed.