The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 09, 2010
Filed:
Jun. 29, 2007
Cameron Wagner, Beaverton, OR (US);
David Shykind, Sherwood, OR (US);
Travis Eiles, Beaverton, OR (US);
Cameron Wagner, Beaverton, OR (US);
David Shykind, Sherwood, OR (US);
Travis Eiles, Beaverton, OR (US);
Intel Corporation, Santa Clara, CA (US);
Abstract
Embodiments allow for uniform die cooling or heating with a solid immersion lens equipped microscope over a larger temperature range than is currently attainable using liquid coolant. The SIL tip is insulated from the rest of the objective body to realize a controllable temperature. This thermal control may be done by convection or Joule heating. If the tip is to be cooled, cold gas may be injected through channels around the tip and fins. If the tip is to be heated, hot gas may be injected around the tip and finsor an electrical heater may be thermal anchored to the tip and a current passed through it to deliver power.