The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 09, 2010
Filed:
Feb. 09, 2007
Martinus Joseph Kok, Eindhoven, NL;
Reinder Teun Plug, Eindhoven, NL;
Sander Kerssemakers, Eindhoven, NL;
Martinus Joseph Kok, Eindhoven, NL;
Reinder Teun Plug, Eindhoven, NL;
Sander Kerssemakers, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
To inspect all portions of the substrate the substrate table can be moved rotationally and linearly. Furthermore the detector can be moved rotationally. This enables all portions of a surface of the substrate to be inspected from all angles in a plane parallel to the substrate. Less linear motion is needed, so the apparatus occupies a smaller volume and generates smaller vibrations.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile