The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 09, 2010
Filed:
Jun. 12, 2007
Benjamin N. Eldridge, Danville, CA (US);
Barbara Vasquez, Lafayette, CA (US);
Makarand S. Shinde, Livermore, CA (US);
Gaetan L. Mathieu, Vareness, CA;
A. Nicholas Sporck, Saratoga, CA (US);
Benjamin N. Eldridge, Danville, CA (US);
Barbara Vasquez, Lafayette, CA (US);
Makarand S. Shinde, Livermore, CA (US);
Gaetan L. Mathieu, Vareness, CA;
A. Nicholas Sporck, Saratoga, CA (US);
FormFactor, Inc., Livermore, CA (US);
Abstract
A wafer test assembly includes multiple probe head substrates arranged like tiles with connectors attached to one side and probes supported on the opposing side. In one embodiment, flexible cable connectors directly connect the connectors on the probe head tile to a test head, while in another embodiment the flexible cables connect the probe head tile to a PCB providing horizontal routing to test head connectors. In one embodiment, leveling pins provide a simplified support structure connecting to a retaining element attached to the tiles to provide for applying a push-pull leveling force. A test head connector interface frame enables rearrangement of connectors between the test head and the probe card to provide for both full wafer contact or partial wafer contact. The test head connectors are rearranged by being slidable on rails, or pluggable and unpluggable enabling movement over a range of positions.